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Unity build for Linux won't work

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Hello, i have an application(server app) which made on Unity for Linux (x86_64) with Headless mode. My system is Centos 7 x64 with installed mono. I tried next steps: 1.

mono ./server.x86_64 -batchmode -nographics

answer:

Cannot open assembly './server.x86_64': File does not contain a valid CIL image. 2.

./server.x86_64 -batchmode -nographics

answer:

Set current directory to /usr/server_Linux_x86_64 Found path: /usr/server_Linux_x86_64/server.x86_64 Mono path[0] = '/usr/server_Linux_x86_64/server_Data/Managed' Mono path[1] = '/usr/server_Linux_x86_64/server_Data/Mono' Mono config path = '/usr/server_Linux_x86_64/server_Data/Mono/etc'

and nothing happens...

What i'm doing wrong?

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